Manufacturer and system integrator of exhaust gas treatment equipment for pan-semiconductor process technologies.

Special Exhaust Gas Treatment System – NOx


In the process, NOₓ generated in the oxidation zone reacts with O₃ (ozone) to form NO₂ and O₂. Subsequently, NO₂ reacts with a reducing agent to produce N₂ and salts; the N₂ can be directly discharged. The salts formed via substitution reactions are discharged together with the wastewater after monitoring the ORP value.

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Special Waste Gas Treatment System – AsH₃, PH₃, B₂H₆, NH₃, etc.


It is primarily used for treating exhaust gases in semiconductor manufacturing, flat-panel displays (LCDs), light-emitting diodes (LEDs), and petrochemical processes. Air pollutants that are harmful to human health are classified as hazardous air pollutants. These pollutants typically originate from process‑generated waste gases; among them, only a portion of the specialty gases is actually consumed in the process reactions, while the emitted effluents include unreacted specialty gases and their by‑products.

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Wet-EP System (Bay, Mid, Roof)


Harmful substances in humid gases, such as dust, acid mist, aerosols, odors, and PM2.5.

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Zeolite rotor


The molecular sieve adsorption‑concentration rotor is disc‑shaped, with a dense honeycomb‑like channel structure inside. The channel surfaces are coated with an adsorbent molecular sieve. In practical operation, the rotor is driven by an external chain and an electric motor, rotating slowly at a few revolutions per hour. Adsorption, desorption, and cooling occur simultaneously in different zones of the rotor, enabling continuous treatment of exhaust gases.

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Centrifugal fan


Professional Fluid Design | Fan Aerodynamic Performance Testing

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FRP TANK


A lightweight, high-strength, corrosion-resistant non-metallic storage tank—advanced in design, with excellent rigidity, superior chemical resistance, and a light yet robust structure; it resists scaling, exhibits strong seismic performance, boasts a long service life, offers low overall costs, enables rapid installation, and ensures safety and reliability.

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