Special Waste Gas Treatment System – AsH₃, PH₃, B₂H₆, NH₃, etc.
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  • Special Waste Gas Treatment System – AsH₃, PH₃, B₂H₆, NH₃, etc.

Special Waste Gas Treatment System – AsH₃, PH₃, B₂H₆, NH₃, etc.

It is primarily used for treating exhaust gases in semiconductor manufacturing, flat-panel displays (LCDs), light-emitting diodes (LEDs), and petrochemical processes. Air pollutants that are harmful to human health are classified as hazardous air pollutants. These pollutants typically originate from process‑generated waste gases; among them, only a portion of the specialty gases is actually consumed in the process reactions, while the emitted effluents include unreacted specialty gases and their by‑products.

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025-52290670

nj@tw-goldenway.com

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System Overview

It is primarily used for treating exhaust gases in semiconductor manufacturing, flat-panel displays (LCDs), light-emitting diodes (LEDs), and petrochemical processes. Air pollutants that are harmful to human health are classified as hazardous air pollutants. These pollutants typically originate from process‑generated waste gases; among them, only a portion of the specialty gases is actually consumed in the process reactions, while the emitted effluents include unreacted specialty gases and their by‑products.

Processing Principle

Adsorption: Arsenic hydride (AsH 3 ) and phosphine (PH 3 ) Gases are adsorbed by the molecular sieve structure of the adsorbent, and the active components of the adsorbent catalyze the conversion of harmful gases into solidified compounds.

It is an irreversible reaction, and the reaction equation is as follows:

2AsH3 +3CuO→Cu 3 As 2 +3H 2 The 2PH 3 +3CuO→Cu 3 P 2 +3H 2 O

Combustion: NO is generated through plasma-induced high-temperature decomposition and combustion (above 1000°C). x Discharge, generating wastewater (HNO 3 ) Discharged after pH neutralization.

Features

High efficiency: Ensures that the concentration of exhaust gases at the outlet meets regulatory standards. Performance is verified using online gas detectors and indicators (color‑changing beads).

Low fire risk: By replacing the physical adsorption of activated carbon (van der Waals forces) with chemical absorption (acid–base neutralization), the risk of fire is reduced, and maintenance costs are lowered.

 

Jinguangheng Technology (Nanjing) Co., Ltd.

Goldenway Environmental Technology Co.,Ltd

Address:No. 12, Tangjia Road, Chunhua Subdistrict, Jiangning District, Nanjing City, Jiangsu Province
Shenzhen Goldenway Environmental Protection Technology Co., Ltd.

Address: 8th Floor, Building 1, Innovation Smart Port, No. 155 Hongtian Road, Huangpu Community, Xinqiao Subdistrict, Bao’an District, Shenzhen
Dongguan Goldenway Environmental Protection and Energy-Saving Technology Co., Ltd.

Address: Dong’ao, Tianraobu Village, Hengli Town, Dongguan City, Guangdong Province
Jiangsu Goldenway Environmental Industrial Equipment Manufacturing Co., Ltd.

Address: Zijing Avenue, Economic Development Zone, Gaochun District, Nanjing City
Jiangsu Goldenway Environmental Technology Co., Ltd.
Address: Building 3, Chunhua Construction Industrial Park, No. 99 Yanchong Road, Chunhua Subdistrict, Jiangning District, Nanjing City
GOLDENWAY ENVIRONMENTAL TECHNOLOGY (THAILAND) CO., LTD (Thailand)
Address: No. 814, Village No. 5, Nawang Hian Subdistrict, Phan Nikhom District, Chonburi Province, Thailand
GOLDENWAY INVESTMENT DEVELOPMENT PTE. LTD. (Singapore)
Address: 91 BENCOOLEN STREET, #12-03, SUNSHINE PLAZA

Contact Information

Phone:025-52290670 025-52290672

Email:nj@tw-goldenway.com

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