Manufacturer and system integrator of exhaust gas treatment equipment for pan-semiconductor process technologies.

Local Scrubber


A miniaturized torch for low power and high efficiency.

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Main Scrubber (Acid-Alkali)


High-quality purification tower body; high-efficiency, low-pressure-drop packing and other components; corrosion-resistant fans; corrosion‑resistant pumps capable of dry running; FRP corrosion‑resistant ductwork; integrated control system.

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VOC Organic Waste Gas Treatment System


The zeolite molecular sieve rotor is divided into three functional zones—treatment, regeneration, and cooling—and continuously rotates through these zones.

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Odor Treatment System – Dry Chemical Filter


Essentially maintenance-free, it requires no complex control systems or intricate piping arrangements.

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Special Exhaust Gas Treatment System – NOx


In the process, NOₓ generated in the oxidation zone reacts with O₃ (ozone) to form NO₂ and O₂. Subsequently, NO₂ reacts with a reducing agent to produce N₂ and salts; the N₂ can be directly discharged. The salts formed via substitution reactions are discharged together with the wastewater after monitoring the ORP value.

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Special Waste Gas Treatment System – AsH₃, PH₃, B₂H₆, NH₃, etc.


It is primarily used for treating exhaust gases in semiconductor manufacturing, flat-panel displays (LCDs), light-emitting diodes (LEDs), and petrochemical processes. Air pollutants that are harmful to human health are classified as hazardous air pollutants. These pollutants typically originate from process‑generated waste gases; among them, only a portion of the specialty gases is actually consumed in the process reactions, while the emitted effluents include unreacted specialty gases and their by‑products.

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