Manufacturer and system integrator of exhaust gas treatment equipment for pan-semiconductor process technologies.

Wet-EP System (Bay, Mid, Roof)


Harmful substances in humid gases, such as dust, acid mist, aerosols, odors, and PM2.5.

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Zeolite rotor


The molecular sieve adsorption‑concentration rotor is disc‑shaped, with a dense honeycomb‑like channel structure inside. The channel surfaces are coated with an adsorbent molecular sieve. In practical operation, the rotor is driven by an external chain and an electric motor, rotating slowly at a few revolutions per hour. Adsorption, desorption, and cooling occur simultaneously in different zones of the rotor, enabling continuous treatment of exhaust gases.

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Centrifugal fan


Professional Fluid Design | Fan Aerodynamic Performance Testing

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FRP TANK


A lightweight, high-strength, corrosion-resistant non-metallic storage tank—advanced in design, with excellent rigidity, superior chemical resistance, and a light yet robust structure; it resists scaling, exhibits strong seismic performance, boasts a long service life, offers low overall costs, enables rapid installation, and ensures safety and reliability.

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Process Exhaust System


A lightweight, high-strength, corrosion-resistant nonmetallic pipe features a rational and advanced wall structure, excellent stiffness, superior chemical resistance, and a light yet robust design. It resists scaling, exhibits strong seismic performance, boasts an extended service life, offers low overall construction costs, enables rapid installation, and ensures safety and reliability.

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