Manufacturer and system integrator of exhaust gas treatment equipment for pan-semiconductor process technologies.

Main Scrubber (Acid-Alkali)


High-quality purification tower body; high-efficiency, low-pressure-drop packing and other components; corrosion-resistant fans; corrosion‑resistant pumps capable of dry running; FRP corrosion‑resistant ductwork; integrated control system.

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VOC Organic Waste Gas Treatment System


The zeolite molecular sieve rotor is divided into three functional zones—treatment, regeneration, and cooling—and continuously rotates through these zones.

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Odor Treatment System – Dry Chemical Filter


Essentially maintenance-free, it requires no complex control systems or intricate piping arrangements.

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Special Exhaust Gas Treatment System – NOx


In the process, NOₓ generated in the oxidation zone reacts with O₃ (ozone) to form NO₂ and O₂. Subsequently, NO₂ reacts with a reducing agent to produce N₂ and salts; the N₂ can be directly discharged. The salts formed via substitution reactions are discharged together with the wastewater after monitoring the ORP value.

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Wet-EP System (Bay, Mid, Roof)


Harmful substances in humid gases, such as dust, acid mist, aerosols, odors, and PM2.5.

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Zeolite rotor


The molecular sieve adsorption‑concentration rotor is disc‑shaped, with a dense honeycomb‑like channel structure inside. The channel surfaces are coated with an adsorbent molecular sieve. In practical operation, the rotor is driven by an external chain and an electric motor, rotating slowly at a few revolutions per hour. Adsorption, desorption, and cooling occur simultaneously in different zones of the rotor, enabling continuous treatment of exhaust gases.

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