Manufacturer and system integrator of exhaust gas treatment equipment for pan-semiconductor process technologies.

Local Scrubber


A miniaturized torch for low power and high efficiency.

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Special Waste Gas Treatment System – AsH₃, PH₃, B₂H₆, NH₃, etc.


It is primarily used for treating exhaust gases in semiconductor manufacturing, flat-panel displays (LCDs), light-emitting diodes (LEDs), and petrochemical processes. Air pollutants that are harmful to human health are classified as hazardous air pollutants. These pollutants typically originate from process‑generated waste gases; among them, only a portion of the specialty gases is actually consumed in the process reactions, while the emitted effluents include unreacted specialty gases and their by‑products.

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