Local Scrubber
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  • Local Scrubber

Local Scrubber

A miniaturized torch for low power and high efficiency.

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Product Details



Product Overview

  • A miniaturized torch for low power and high efficiency.
  • Smooth electrode structure for plasma flame and gas contact
  • CF 4 NF 3 SF and other PFCs s Safe thermal decomposition treatment of gases
  • PM cycle extended with electrode life exceeding 6 months

Process flow

  • Inlet Chamber: A rotating structure that ensures smooth mixing between incoming gas and thermal energy.
  • Reaction Chamber: The gas complete decomposition zone, lined with corrosion-resistant refractory material (AI series) to prevent heat loss through the insulation.
  • N 2 Sleeve Part:N 2 The curtain forms a membrane structure, and the powder in the downstream pipeline is relieved of buildup.

Product Message

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